IEEE Transactions on Plasma Science

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Ищу статью
Particle simulation of radio-frequency plasma discharges of methanefor carbon film deposition
Nagayama, K. Farouk, B. Lee, Y.H.
Sumitomo Electr. Ind. Ltd., Yokohama;
IEEE Transactions on Plasma Science
Publication Date: Apr 1998
Volume: 26, Issue: 2
On page(s): 125-134
ISSN: 0093-3813
References Cited: 23

INSPEC Accession Number: 5922799

Digital Object Identifier: 10.1109/27.669604

Posted online: 2002-08-06 21:42:44.0

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http://ieeexplore.ieee.org/iel4/27/14700/00669604.pdf?tp=&isnumber=14700&arnumber=669604

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