(книга есть на гуглбукс'е, но там самые интересные страницы недоступны
Ion-Solid Interactions: Fundamentals and Applications
Author(s): Michael Nastasi, James Mayer, James K. Hirvonen
ISBN10: 0521616069
ISBN13: 9780521616065
http://dx.doi.org/10.1016/S0921-5093(99)00611-5
и две статьи из любимого Nuclear Instruments and Methods in Physics Research:
Range profiles of 10 to 390 keV ions (29 less-than over equal to Z1 less-than over equal to 83) implanted into amorphous silicon
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 28, Issue 4, 1 November 1987, Pages 481-487
P. F. P. Fichtner и сотоварищи
http://dx.doi.org/10.1016/0168-583X(87)90491-5
Comparison of theoretical and empirical interatomic potentials D.J. O'connora and J.P. Biersack
http://dx.doi.org/10.1016/0168-583X(86)90243-0
Заранее спасибо..