Jang J., An E., Park I. W., Nam D. G., Jo I., Lin J. L., Moore J. J., Kim K. H., Park I. - Microstructure and mechanical properties of Ti-B-C-N-Si nanocomposite films deposited by unbalansed magnetron sputtering. // Journal of Vacuum Science & Technology A. 2013. V. 31. N. 6. Article 061401.
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http://dx.doi.org/10.1116/1.4815952
