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The Effect of Surfactants on the Removal of Ceria Particles in the Buff Clean Process
Yingjie Wang, Qiancheng Sun, Wenlong Tang, Li-Na Qiu, Xin-Ping Qu, Satomi Hamada, Yutaka Wada and Hirokuni Hiyama
ECS Journal of Solid State Science and Technology, Volume 12, Number 9
2023 ECS J. Solid State Sci. Technol. 12 094002

DOI:

http://dx.doi.org/10.1149/2162-8777/acec97

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