1) done
2) Microelectronic Engineering
Volume 86, Issue 2, February 2009, Pages 171-175
"The effect of ultrasonic agitation on the stripping of photoresist using supercritical CO2 and co-solvent formulation "
Sung Ho Kim etc.
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http://dx.doi.org/10.1016/j.mee.2008.10.017Volume 125, Issue 2, 22 January 2008, Pages 96-106
"Supercritical antisolvent production of biodegradable micro- and nanoparticles for controlled delivery of paclitaxel "
Lai Yeng Lee etc.
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http://dx.doi.org/10.1016/j.jconrel.2007.10.002Volume 278, Issues 1-2, 14 December 2007, Pages 237-243
"An active La/TiO2 photocatalyst prepared by ultrasonication-assisted sol–gel method followed by treatment under supercritical conditions "
Yuning Huo etc.
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http://www.sciencedirect.com/science/journal/13811169