Effect of ammonia on Ta filaments in the hot wire CVD process
Авторы
V. Verlaan, C.H.M. van der Werf, C.J. Oliphant, R. Bakker, Z.S. Houweling and R.E.I. Schropp
Источник
1). Utrecht University, Faculty of Science, Department of Physics and Astronomy, Nanophotonics-Physics of Devices, P.O. Box 80,000, 3508 TA Utrecht, The Netherlands
2). National Centre for Nano-Structured Materials, CSIR, P.O. Box 395, Pretoria, 0001, South Africa
Код: Выделить всё
http://dx.doi.org/10.1016/j.tsf.2009.01.064
