Gabouze N., Keffous A., Kerdja T., Belaroussi Y. - Chemical etching investigation of polycrystalline p-type 6H-SiC in HF/Na2O2 solutions. // Applied Surface Science. 2009. V. 255. N. 16. P. 6751 - 6756.
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http://dx.doi.org/10.1016/j.apsusc.2009.02.084
