Jpn. J. Appl. Phys. 27 (1988) pp. 319-322
Molecular Beam Flux Monitor Using Cold Cathode Discharge Induced Emission Spectroscopy
Junro Sakai, Guorong Chen, Kimiaki Hirama, Shun-ichi Murakami and Tetsuo Ishida
- DOI:
http://dx.doi.org/10.1143/JJAP.27.319
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http://jjap.ipap.jp/link?JJAP/27/319/