Journal of Physics E: Scientific Instruments
Volume 16, Number 6
Issue 6 ( 1 Июнь 1983)
D Evans , B Hall and J E Morris
Microcomputer control of thin film deposition rate
- DOI:
http://dx.doi.org/10.1088/0022-3735/16/6/021
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http://iopscience.iop.org/0022-3735/16/6/021;jsessionid=65BD1F9DA63EF7A6B54C38A469FF7C99.c1