Microelectronics, 2000. ICM 2000. Proceedings of the 12th International Conference on
"Design and implementation of an adaptive controller for electron beam evaporation system"
Ahadi, M. Jamshidi, K. Rashidian, B.
Sharif Univ. of Technol., Tehran
On page(s): 349 - 352
- DOI:
http://dx.doi.org/10.1109/ICM.2000.916475
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