Journal Measurement Science and Technology
Volume 4, Number 3
Issue 3 (March 1993)
Страницы не указаны, может 321:
Meas. Sci. Technol. 4 321
N I Donkov
"On the power control of evaporation sources with hot filament and magnetic beam deflection"
- DOI:
http://dx.doi.org/10.1088/0957-0233/4/3/010
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http://iopscience.iop.org/0957-0233/4/3/010