On the Ni–Si phase transformation with/without native oxide
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P.S. Lee, D. Mangelinck, K.L. Pey, J. Ding, J.Y. Dai, C.S. Ho and A. See
Microelectronic Engineering
Volumes 51-52, May 2000, Pages 583-594
- DOI:
http://dx.doi.org/10.1016/S0167-9317(99)00521-3