1) The chemical vapor deposition of SiO2 from teos
John E. Crowella, Laura L. Teddera, Hee-Chuen Choa, Frank M. Cascaranoa and Mark A. Logan
Journal of Electron Spectroscopy and Related Phenomena
Volumes 54-55, 1990, Pages 1097-1104
- DOI:
http://dx.doi.org/10.1016/0368-2048(90)80299-P
B. Delperiera, C. Vinanteb and R. Morancho
Journal of Analytical and Applied Pyrolysis
Volume 13, Issues 1-2, January 1988, Pages 141-149
- DOI:
http://dx.doi.org/10.1016/0165-2370(88)80054-8