1) Microwave plasma chemical vapour deposition of tetramethylsilane: correlations between optical emission spectroscopy and film characteristics
L. Thomasa, L. Mailléa, J.M. Badieb and M. Ducarroir
Surface and Coatings Technology
Volumes 142-144, July 2001, Pages 314-320
Proceedings of the 7th International Conference on Plasma Surface Engineering
- DOI:
http://dx.doi.org/10.1016/S0257-8972(01)01081-7
2) Comparisons of glow-discharge polymerizations among tetramethylsilane, dimethyldimethoxysilane, and tetramethoxysilane
N. Inagaki, M. Koyama
Journal of Polymer Science: Polymer Chemistry Edition
Volume 21, Issue 1, pages 183–190, January 1983
- DOI:
http://dx.doi.org/10.1002/pol.1983.170210119
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