Помогите, пожалуйста, ознакомиться со статями:
1) Characteristics of PECVD GaN thin films
C. H. Lee and C. T. Chen
Applied Surface Science, Volume 92, 2 February 1996, Pages 124-127
Proceedings of the Seventh International Conference on Solid Films and Surfaces
- DOI:
http://dx.doi.org/10.1016/0169-4332(95)00214-6
Bing Zhou, K. S. A. Butcher, Helen Zou, Xin Li and T. L. Tansley
Solid-State Electronics, Volume 41, Issue 2, February 1997, Pages 279-281
Proceedings of the Topical Workshop on III-V Nitrides
- DOI:
http://dx.doi.org/10.1016/S0038-1101(96)00229-8