Thin Solid Films Volume 171, Issue 1, 1 April 1989, Pages 81-92
Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering
F.M. D'Heurle and J.M.E. Harper
Код: Выделить всё
http://dx.doi.org/10.1016/0040-6090(89)90035-7