Скачайте, пожалуйста, статью:
Transport and reaction behaviour in Aix-2000 planetary metalorganic vapour phase epitaxy reactor
T. Bergunde, D. Gutsche, L. Kadinski, Yu. Makarov and M. Weyers
Journal of Crystal Growth,Volume 146, Issues 1-4, 1 January 1995, Pages 564-569
- DOI:
http://dx.doi.org/10.1016/0022-0248(94)00573-7