Помогите, пожалуйста, ознакомиться со статьями:
1) High temperature growth rate in MOCVD growth of AlGaAs
Tetsuo Soga, Yasuhito Takahashi, Shiro Sakai and Masayoshi Umeno
Journal of Crystal Growth
Volume 68, Issue 1, 1 September 1984, Pages 169-175
- DOI:
http://dx.doi.org/10.1016/0022-0248(84)90413-5
2) Current status of selective area epitaxy by OMCVD
Rajaram Bhat
Journal of Crystal Growth
Volume 120, Issues 1-4, 2 May 1992, Pages 362-368
- DOI:
http://dx.doi.org/10.1016/0022-0248(92)90419-J
