Помогите, пожалуйста, достать статью:
Implementation of a geometrically based criterion for film uniformity control in a planetary SiC CVD reactor system
Rinku P. Parikh, Raymond A. Adomaitis, James D. Oliver, Brian H. Ponczak
Journal of Process Control
Volume 17, Issue 5, June 2007, Pages 477-488
- DOI:
http://dx.doi.org/10.1016/j.jprocont.2006.04.004
