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Novel selective area growth of AlGaAs and AlAs with HCl gas by MOVPE
K. Shimoyama, Y. Inoue, K. Fujii, H. Gotoh
Journal of Crystal Growth
Volume 124, Issues 1-4, 1 November 1992, Pages 235-242
- DOI:
http://dx.doi.org/10.1016/0022-0248(92)90465-U