1) Akira Hirako1,2, Kazuhide Kusakabe1 and Kazuhiro Ohkawa1,2, Modeling of Reaction Pathways of GaN Growth by Metalorganic Vapor-Phase Epitaxy Using TMGa/NH3/H2 System: A Computational Fluid Dynamics Simulation Study
Jpn. J. Appl. Phys. 44 (2005) pp. 874-879
- DOI:
http://dx.doi.org/10.1143/JJAP.44.874