+++ Jpn. J. Appl. Phys. - 3ст.

[o-oxhem]

Здравствуйте! Прошу скачать статьи:

1) Akimasa Yuuki, Yasuji Matsui and Kunihide Tachibana, A Numerical Study on Gaseous Reactions in Silane Pyrolysis
Jpn. J. Appl. Phys. 26 (1987) pp. 747-754

DOI:

http://dx.doi.org/10.1143/JJAP.26.747

2) Akimasa Yuuki, Yasuji Matsui and Kunihide Tachibana, A Study on Radical Fluxes in Silane Plasma CVD from Trench Coverage Analysis
Jpn. J. Appl. Phys. 28 (1989) pp. 212-218

DOI:

http://dx.doi.org/10.1143/JJAP.28.212

3) Motoaki Kawase, Tsuyoshi Nakai, Akimasa Yamaguchi, Tomohiro Hakozaki and Kenji Hashimoto, Jpn. J. Appl. Phys. 36 (1997) pp. 3396-3407

Numerical Simulation of Plasma Chemical Vapor Deposition from Silane: Effects of the Plasma-Substrate Distance and Hydrogen Dilution

DOI:

http://dx.doi.org/10.1143/JJAP.36.3396

Спасибо.

[o-oxhem]

прошу. Очень нужно.

[Beladonna]

[o-oxhem]

спасибо.