Lee G. J., Lee K. M., Hong W. S., Kim S. S., Cheong H., Yoon C. S., Lee Y. P. - Fabrication of nanocrystalline silicon gratings embedded within a silicon nitride matrix by femtosecond laser-induced crystallization. // Japanese Journal Applied Physics. 2010. V. 49. Article 015502.
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http://dx.doi.org/10.1143/JJAP.49.015502