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Ning Jianga, H.J. Zhanga, S.N. Baoa, Y.G. Shenb and Z.F. Zhoub
XPS study for reactively sputtered titanium nitride thin films deposited under different substrate bias
Physica B: Condensed Matter
Volume 352, Issues 1-4, 30 October 2004, Pages 118-126
- DOI:
http://dx.doi.org/10.1016/j.physb.2004.07.001