Adsorption of Trace Phosphine in Circular Hydrogen of a Polysilicon Chemical Vapor Deposition Stove by Cu/γ-Al2O3
Yeming Zhou, Taifeng He, Shuaifeng Liu, and Guoqiang Huang
Ind. Eng. Chem. Res. 2018, 57, 44, 15122–15131
Publication Date:October 16, 2018
- DOI:
http://dx.doi.org/https://doi.org/10.1021/acs.iecr.8b02940