+++ Spring / SciDir - 3 papers +++ Спасибо, FIN

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[Springer]

Experimental and theoretical analysis of single-sided and double-sided chemical mechanical polishing of sapphire wafers
Zhongyang Li, Zhaohui Deng, Jimin Ge, Tao Liu & Linlin Wan
The International Journal of Advanced Manufacturing Technology
Volume 119, 2022, 5095–5106

DOI:

http://dx.doi.org/10.1007/s00170-021-08404-5

[ScienceDirect]

Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations
Yida Zou, Xinhuan Niu, Ni Zhan et al.
Materials Chemistry and Physics
Volume 316, 2024, 129066

DOI:

http://dx.doi.org/10.1016/j.matchemphys.2024.129066

Micro-mechanism of glycine action in tribochemical mechanical polishing of single-crystal sapphire substrate: Experimental and first-principles analysis
Congming Ke, Yiao Pang, Zongnan Zhang
MaterialsToday Communications
Volume 41, 2024, 110503

DOI:

http://dx.doi.org/10.1016/j.mtcomm.2024.110503

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огроменное спасибо =)